Progress on Boron Nitride Interface Coating Achieved by CVD
DOI:
Author:
Affiliation:

Clc Number:

TB3

Fund Project:

  • Article
  • |
  • Figures
  • |
  • Metrics
  • |
  • Reference
  • |
  • Related
  • |
  • Cited by
  • |
  • Materials
  • |
  • Comments
    Abstract:

    The characteristics of BN and CVD are reviewed. Then the deposition process and the effect of deposi ̄
    tion temperatureꎬ source gases compositionꎬ heat treatment during the preparation by CVD are summarized. The stabili ̄
    zation of process conditions and the reaction mechanism will be the trend for the development of BN coatings. The meth ̄
    od to obtain uniform ꎬ controllable thickness and ordered BN interface coatings will be forced in the future study.

    Reference
    Related
    Cited by
Get Citation
Share
Article Metrics
  • Abstract:
  • PDF:
  • HTML:
  • Cited by:
History
  • Received:
  • Revised:
  • Adopted:
  • Online: November 28,2016
  • Published: