Abstract:To solve the ceramic substrate metal film-integrated component of laser micro-machining accuracy
problems,under atmospheric environment,nanosecond pulsed laser effects,of the Cu ( Ni80Cr20 ) -Al2O3 composite
body were studied experimentally of film/ substrate on interface separation mechanism. The results show that: when laser
ablation Cu, laser spot effected region can be completely gasified to give a more smooth image,but when ablation
the Ni80Cr20,laser spot effected region first nitride,the nitride layer is then peeled off leading edge of the rough ablation
pattern. Gaussian distribution of the energy of the laser spot,making Ni80Cr20unevenly nitrided,is the main reason
affecting the precision of the ablation. Laser wavefront diffraction transform technology is employed, making the spot
from the Gaussian distribution of energy into energy distribution is flattened. When the laser energy is greater than 5． 4
mJ,the Ni80Cr20 layer thickness 4 μm uniform nitrided,then peeled,realized Ni80Cr20 -Al2O3 assembly precision,without
damage to the substrate ablation.
