Optical Polishing Experiment of Cf -Zerodur Composites Mirror
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    Abstract:

    The two cf-zerodur composites mirrors with and without pre-embedded parts are polished by continuous
    polishing method, and they are under stability experiment after polishing. The surface figures of the cf-zerodur
    composites mirrors are measured by a Zygo interferometer. The surface errors of the mirror without pre-embedded parts
    after the stability experiment are as follows:the P-V error is 2. 313λ,the RMS error is 0. 669λ. The surface errors of
    the mirror with pre-embedded parts after the stability experiment are as follows: the P-V error is 3. 013λ,the RMS error
    is 0. 276λ(λ =632. 8 nm). The experimental results show that the structure of cf-zerodur composites mirror with
    pre-embedded parts is better than that of without pre-embedded parts. The paper presents some references for the application
    of cf-zerodur composites mirrors.

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  • Received:
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  • Online: November 28,2016
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