This paper reviews the latest domestic and overseas developments in the manufacturing process of millimeter-wave and submillimeter-wave waveguide components， and classifies and elaborates the most adopted processes， including machining improvement and CNC ultra-precision process， electro-chemical process， micro-electro -mechanical system （MEMS） process， high energy beam process， and 3D additive manufacturing process. The typical results of the latest progress in the application of the processes are introduced， and the advantages and limitations of the process methods are discussed. According to the application requirements of waveguide products， the trend of the process research and development is analyzed. Combining the application scenarios and the future development trend of millimeter-wave and submillimeter-wave waveguide products， the possible future development direction of each classified process in this field is proposed.