Research Progress of W-Ti Alloy Targets for Magnetron Sputtering
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Aerospace Research Institute of Materials & Processing Technology,Beijing 100076

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TG14

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    Abstract:

    W-Ti alloy targets can be used as raw materials to prepare W-Ti, W-Ti-N, W-Ti-O and other functional films by magnetron sputtering technology, which can be used in integrated circuits, thin film solar cells and other fields. In this paper, the performance indexes, preparation techniques and application areas of W-Ti alloy targets were introduced. Finally, the authors suggest that high purity, full density, less Ti-rich phase, small particle size, large size and low cost are important directions of W-Ti alloy targets.

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History
  • Received:August 06,2021
  • Revised:August 30,2021
  • Adopted:September 26,2021
  • Online: January 13,2022
  • Published: