As a new type of high safety and high reliability pyrotechnic device， the exploding foil initiator can be widely used in many technical fields such as the ignition and detonation of weapon systems， the actuation separation of aircraft and spacecraft. Starting from the development trend of pyrotechnics integration， miniaturization and low cost， the research status of MEMS explosive foil initiator chip and high voltage switch is introduced based on thin film integration process， low temperature co-fired ceramic process and printed circuit board process. The respective characteristics are analyzed and compared from the aspects of design， preparation， firing performance， and cost. Finally， the research progress of exploding foil initiator chips in new fields such as overpressure initiation， electric explosion and plasma discharge coupling are introduced.