Abstract:SiBAlON ceramic precursors were prepared by blending polyaluminoxane and polyborosilazaneꎬwhich
were used as aluminumꎬsilicon and boron sourceꎬrespectively.The precursor could be transformed into SiBAlON ce ̄
ramic during the pyrolysis process and its pyrolytic behavior and phase composition were studied by TGA and XRD.
Results indicated that the phase composition of the ceramic sample is strongly affected by the Al content of the ceram ̄
ic.The ceramic with a Al content of 10wt% remained amorphous until β-Si3N4 initially generated at 1 300℃.Heating
to 1 500℃ led to the formation of Si2N2O and Si3Al3O3+1.5x N5-x via reaction of Al and O with amorphous Si-N.Further
heating to 1 700℃ led to the formation of β’ -SiAlON via reaction of Al and O with β-Si3N4.The obtained SiBAlON
ceramic has excellent dielectric property at room and high temperature.