Abstract:Tungsten doped hydrogenated diamond-like carbon films ( W -C: H) were deposited on 40Cr,
9Cr18, GCr15, TC4 and LY12 substrates with the unbalanced magnetron sputtering method. The surface morphology,
microstructure, microhardness, adhesion, and tribological properties of the films were characterized by scanning electron
microscope(SEM), Raman spectroscope, nano-hardness/ scratch tester, and ball-on-disk tribo-meter respectively.
The effect of different substrate materials on tribological properties of the deposited films were studied under dry
friction and PEPE grease lubrication conditions. Films quality testing results shows the films with 1 μm thickness have
typical diamond-like structures and exhibit high hardness 11. 56 GPa, elastic modulus 128. 34 GPa, and good adhension
645 mN. Tribological test results show that the friction coefficient and wear rate of the films deposited on several
metal substrates are significant different in dry sliding, and the substrate effect is smaller under grease lubrication.
Compared with the friction results in dry sliding,the wear under grease lubrication can reduce 60% to 75%. The WC:
H films deposited on 9Cr18 and 40Cr substrates provide the minimum wear rate of 1. 71×10-7 mm3 / (N·m) and 4.
55×10-8 mm3 / (N·m) in dry sliding and grease lubrication respectively.
