Cu(Ni80 Cr20 )-陶瓷复合机体的激光刻蚀机制

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Cu(Ni80 Cr20 )-陶瓷复合机体的激光刻蚀机制
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作者单位:兰州空间技术物理研究所
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中图分类号:TN249
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Laser Ablation Mechanism of Cu( Ni80 Cr20 ) -Ceramic Composite Body

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摘要:

为解决陶瓷基底金属薄膜一体化部件的激光微加工精度问题,研究了纳秒脉冲激光作用于Cu

(Ni80Cr20) -Al2O3 复合机体的薄膜/ 基底界面分离机制。结果表明:激光刻蚀Cu 时,光斑扫过的区域的Cu 能

够完全气化,得到较光滑的图案;在刻蚀Ni80Cr20 时,光斑扫过的区域首先被氮化,随后氮化层剥离,导致刻蚀

图形边沿粗糙。激光光斑能量呈高斯分布,使得Ni80Cr20 氮化程度不均匀,是影响刻蚀精度的主要原因。利用

波前衍射变换技术将光斑能量由高斯分布转换为能量呈平顶分布,在激光能量大于5. 4 mJ 时,厚度4 μm 的

Ni80Cr20 层均匀氮化剥离,实现了Ni80Cr20 -Al2O3 组合体高精度、基底无损伤刻蚀。

Abstract:

To solve the ceramic substrate metal film-integrated component of laser micro-machining accuracy

problems,under atmospheric environment,nanosecond pulsed laser effects,of the Cu ( Ni80Cr20 ) -Al2O3 composite

body were studied experimentally of film/ substrate on interface separation mechanism. The results show that: when laser

ablation Cu, laser spot effected region can be completely gasified to give a more smooth image,but when ablation

the Ni80Cr20,laser spot effected region first nitride,the nitride layer is then peeled off leading edge of the rough ablation

pattern. Gaussian distribution of the energy of the laser spot,making Ni80Cr20unevenly nitrided,is the main reason

affecting the precision of the ablation. Laser wavefront diffraction transform technology is employed, making the spot

from the Gaussian distribution of energy into energy distribution is flattened. When the laser energy is greater than 5． 4

mJ,the Ni80Cr20 layer thickness 4 μm uniform nitrided,then peeled,realized Ni80Cr20 -Al2O3 assembly precision,without

damage to the substrate ablation.

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韦波. Cu(Ni80 Cr20 )-陶瓷复合机体的激光刻蚀机制[J].宇航材料工艺,2015,45(1).

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在线发布日期: 2016-11-28
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