In order to solve the problem of severe drill wear and bad quality of hole processing during the drilling process of carbon fiber composite materials and titanium, an ultrasonic vibration drilling device is designed. The per鄄 formance of ultrasonic vibration drilling device depends on the quality of sound vibration system. In this paper, the design of the structure of the sound vibration system was analyzed theoretically. And then the modal analysis and har鄄 monious response analysis was carried out using the ANSYS software. In the drilling tests of the carbon fiber composite materials and titanium, the ultrasonic vibration drilling axial drilling force decline 48% and 31% than ordinary drill鄄 ing axial drilling force respectively. It showed that the developed ultrasonic vibration drilling device has a good drilling performance.