Quantitive Phase Analysis of Si-TiO2 by Rietveld Refinement of XRD Patterns
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摘要:
利用X 射线衍射仪对不同配比的Si 和TiO2样品进行分析,通过三种定量分析方法(峰高法、积分 强度法、全谱结构拟合法)进行计算,并进行误差分析。结果表明:三种定量分析方法中,全谱结构拟合法最 优,相对误差为依2%( n = 3),误差最小。X 射线衍射全谱拟合法是一种精确,快速的定量方法。
Abstract:
X鄄ray diffraction method ( XRD) includes two tasks:qualitative and quantitative analysis. The three ratios of(Si +TiO2)are analyzed by XRD,the quantitative analysis data were obtained from the rietveld analyses . The results show that the compositions are close to the real ratio of the samples. The Rietveld methord is reliable for the quantitative phase analysis. and the relative standard deviation was 依2% (n = 3). The results demonstrate that X鄄ray powder diffraction combining with the rietveld refinement method is an accurate, convenient and speed鄄up method.