The scanning figure was designed in terms of the electron beam(EB) characteristics. Titanium alloy and silicate coating were fabricated by electron beam irradiation with this figure, the effect of scanning figure on energy input uniformity was studied. The temperature field uniformity of the melting point was synthetically influenced by EB scanning figure, EB quality, EB scanning frequency and EB parameter. This scanning figure was suitable for EB cladding process. EB scanning figure is a pivotal factor affecting the temperature field of the remelting surface in the process of EB modification.