6H-SiC滚磨抛光损伤机理的分子动力学仿真研究
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作者单位:

1.三峡大学机械与动力学院,宜昌 443002;2.三峡大学石墨增材制造技术与装备湖北省工程研究中心,宜昌 443002;3.昆明物理研究所,昆明 650223

作者简介:

耿瑞文,1993出生,博士,硕导,主要从事精密制造与装备设计工作。E-mail:precious.grw@gmail.com

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中图分类号:

TP391.9

基金项目:

水电机械设备设计与维护湖北省重点实验室开放基金(2023KJX04);宜昌市自然科学基金(A25-3-005);隧道工程灾变防控与智能建养全国重点实验室开放基金课题(TESKL202415);湖北省教育厅科学技术研究项目(B2024020)


Molecular Dynamics Simulation on the Damage Mechanism of 6H-SiC Tumbling Polishing
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1.College of Mechanical and Power Engineering,China Three Gorges University,Yichang 443002;2.Hubei Engineering Research Center of Graphite Additive Manufacturing Technology and Equipment, China Three Gorges University,Yichang 443002;3.Kunming Institute of Physics,Kunming 650223

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    摘要:

    碳化硅在红外光学和半导体制造领域有着广泛的应用,在纳米尺度研究硬脆性碳化硅的滚磨抛光行为对于提高元件性能有着重要意义。本研究建立6H-SiC滚磨抛光分子动力学模型,以研究金刚石磨粒滚动速度对6H-SiC工件的滚磨抛光材料去除行为、表面形貌、亚表面损伤、切向力和法向力、摩擦因数的影响规律,以揭示6H-SiC滚磨抛光损伤机理。结果表明:在滚动速度为25 m/s时,切屑在磨粒的剪切及挤压作用下堆积在磨粒前方;随着滚动速度的增长,切屑黏附于磨粒并发生飞离,导致工件表面无切屑原子堆积;随着磨粒滚动速度的增大,6H-SiC去除机制逐渐由耕犁为主转变为以黏附为主,工件亚表面损伤深度、原子平均温度、切向力、法向力和摩擦因数随之呈逐渐降低的趋势。在滚动速度为100 m/s时,切向力降幅约75%,法向力降幅约40%,摩擦因数降幅约72%。

    Abstract:

    Silicon carbide (SiC) is widely used in infrared optics and semiconductor manufacturing. Investigating the grinding and polishing behavior of hard and brittle silicon carbide at the nanoscale is of great significance for improving component performance. In this study, a molecular dynamics model of 6H-SiC tumbling polishing was established to investigate the influence of different rolling speeds of diamond abrasive grains on the material removal behavior, surface morphology, subsurface damage, tangential and normal forces, and friction coefficient of the 6H-SiC workpiece, thereby revealing the damage mechanism of 6H-SiC during grinding and polishing. The results indicate that at a rolling speed of 25 m/s, chips accumulate in front of the abrasive grain due to shear and extrusion. As the rolling speed increases, the chips adhere to the abrasive grain and eventually detach, resulting in no chip accumulation on the workpiece surface. With an increase in the abrasive grain’s rolling speed, the material removal mechanism of 6H-SiC gradually shifts from being predominantly plowing-driven to adhesion-driven. Consequently, the subsurface damage depth, average atomic temperature, tangential force, normal force, and friction coefficient exhibit a gradual decreasing trend. At a rolling speed of 100 m/s, the tangential force decreases by approximately 75%, the normal force by about 40%, and the friction coefficient by roughly 72%.

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双佳俊,耿瑞文,谢启明,吴海华,李立军.6H-SiC滚磨抛光损伤机理的分子动力学仿真研究[J].宇航材料工艺,2025,55(6):15-24.

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  • 收稿日期:2024-07-18
  • 最后修改日期:2024-08-19
  • 录用日期:2024-10-28
  • 在线发布日期: 2025-12-29
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