碳化硅陶瓷脉冲激光加工改性表面特征研究
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湖南科技大学机电工程学院难加工材料高效精密加工湖南省重点实验室,湘潭 411201

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TN249

基金项目:

湖南省自然科学基金(2022JJ5178);湖南省教育厅科学研究(20A202);难加工材料高效精密加工湖南省重点实验室开放基金(E21853)


Study on Modified Surface Characteristics of Silicon Carbide Ceramics Processed by Pulsed Laser
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Hunan Provincial Key Laboratory of High Efficiency and Precision Machining of Difficult-to-cut Material, School of Mechanical Engineering, Hunan University of Science and Technology,Xiangtan 411201

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    摘要:

    采用脉冲激光对碳化硅陶瓷进行加工,通过单因素实验探究激光功率、扫描次数、光斑重叠率等激光工艺参数对工件改性表面特征的影响规律。实验结果表明,当激光功率较小时,工件表面形成周期性的起伏沟槽,且随机分布着破碎凹坑;当激光功率逐渐增大时,工件表面逐渐出现崩裂的热致裂纹;表面粗糙度随激光功率的增大先减小后增大。当扫描次数较少时,工件表面结构较为浅薄、稀松;随着扫描次数的增加,工件表面形成的结构凹凸不平;表面粗糙度随扫描次数的增大先减小后增大。在低光斑重叠率条件下,工件表面沟槽较浅、整体表面起伏较小;当光斑重叠率逐渐增大时,表面沟槽逐渐变深,工件表面出现孔洞;表面粗糙度随光斑重叠率增大而增大。

    Abstract:

    The silicon carbide ceramics were processed by pulsed laser.The influence of laser process parameters such as laser power, scanning times and spot overlap rate on the modified surface characteristics of the workpiece was investigated by single factor experiment.The experimental results show that when the laser power is small, the workpiece surface forms periodic undulation groove and broken pits are randomly distributed. When the laser power gradually increases, the workpiece surface gradually appears thermal cracks. The surface roughness first decreases and then increases with the increase of laser power.When the scanning times are low, the structure formed on the workpiece surface is shallow and loose.With the increase of laser scanning times, the structure formed on the workpiece surface is uneven.The surface roughness first decreases and then increases with the increase of scanning times. At low spot overlap rate,the workpiece surface groove is shallow and the overall surface undulation is weak. When the spot overlap rate increases,the surface grooves become deeper and the holes appear. The surface roughness increases with the increase of spot overlap rate.

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刘伟,顾浩,唐都波,刘顺.碳化硅陶瓷脉冲激光加工改性表面特征研究[J].宇航材料工艺,2024,54(4):126-130.

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  • 收稿日期:2022-03-08
  • 最后修改日期:2024-08-16
  • 录用日期:2022-08-12
  • 在线发布日期: 2024-09-03
  • 出版日期: 2024-08-31