By using pitch based carbon filaments as the substrate in cold wall chemical vapor deposition
process, silicon carbide filaments were prepared from methyltrichlorosilane and hydrogen system. The effect of deposi tion temperature (from 1 473 K to 1 773 K) on microstructure of as prepared fibers was investigated by scanning elec tron microscopy and Raman spectrascopy. The results shows that the main crystalline phase of coating is SiC. The increase in deposition temperature leads to the increase of deposition rate and the enlargement of grain size of SiC coat ing. Meanwhile, as the deposited temperature increases, the microstructure rearrangement of the central region of car bon core results in the decrease of grain size and better orientation.