Institute of Chemistry， Chinese Academy of Sciences，Beijing 100190
以三氯化硼和甲基氢二氯硅烷为原料，通过与六甲基二硅氮烷和氨气的分步反应合成液态前驱体，在氨气中裂解脱碳得到SiBN陶瓷，改变投料比实现对前驱体陶瓷产率与元素组成的调控。采用NMR、FTIR、XRD、SEM、元素分析等方法对前驱体裂解过程及其不同温度陶瓷产物进行细致分析。结果表明，前驱体经过900 ℃氨气裂解完成陶瓷化过程，裂解产物中的硼含量超过13 %（w），经过1 400 ℃氮气或空气处理的陶瓷产物保持无定型态，具有良好的耐高温及抗氧化性。
Liquid ceramic precursor was synthesized by boron trichloride and methyldichlorosilane as raw materials through the two-step reaction with hexamethyldisilazane and ammonia. The precursor was pyrolyzed and decarbonized in ammonia to produce SiBN ceramics. The ceramic yield and elemental composition of the precursor were easily regulated by changing the feeding ratio. The pyrolysis process of the precursor and the ceramic products obtained from different temperatures were characterized by NMR， FTIR， XRD， SEM and elemental analysis. The results show that the ceramization is completed at 900 ℃ under ammonia， and the boron content of the pyrolyzed product is more than 13 %（w）. The ceramic product， which is obtained at 1 400 ℃ nitrogen or air environment， remains amorphous and has high temperature and oxidation resistance.