磁控溅射钨管靶材低温热等静压模拟与实验验证
DOI:
作者:
作者单位:

航天材料及工艺研究所

作者简介:

通讯作者:

中图分类号:

基金项目:


Simulation and Experimental Verification of Low-temperature Hot Isostatic Pressing of Magnetron Sputtered Tungsten Tube Target
Author:
Affiliation:

Aerospace Research Institute of Materials&Processing Technology

Fund Project:

  • 摘要
  • |
  • 图/表
  • |
  • 访问统计
  • |
  • 参考文献
  • |
  • 相似文献
  • |
  • 引证文献
  • |
  • 资源附件
  • |
  • 文章评论
    摘要:

    为研究钨管靶材低温热等静压成形过程,本文利用MSC.Marc建立有限元分析模型,分析了钨管靶材不同部分在热等静压过程中的致密度与应力变化情况,并且将模拟结果与粗细两种钨粉试验件进行合理性验证。结果表明,热等静压后钨管靶材致密度与应力均呈现“两端低中部高”的状态;细粗两种钨粉实验件与模拟计算相比,致密度平均误差仅为1.36 %和2.86%,外轮廓平均误差仅为1.17 %和1.57%,模拟过程合理性强,实际工程意义显著。

    Abstract:

    In order to study the low-temperature hot isostatic pressing forming process of tungsten tube target. In this paper, a finite element analysis model was developed using MSC.Marc to analyze the changes in densities and stresses in different parts of tungsten tube targets during hot isostatic pressing. And the rationality of the simulation results is verified with the two kinds of tungsten powder test pieces.The results show that after hot isostatic pressing, the density and stress of tungsten tube target present the state of "low at both ends and high in the middle";compared with the simulation calculation, the average error of the density of the two kinds of tungsten powder experimental parts is only 1.36% and 2.86%, and the average error of the outer profile is only 1.17% and 1.57%, which shows that the simulation process is reasonable, and the practical and engineering significance is significant.

    参考文献
    相似文献
    引证文献
引用本文
分享
文章指标
  • 点击次数:
  • 下载次数:
  • HTML阅读次数:
  • 引用次数:
历史
  • 收稿日期:2024-01-15
  • 最后修改日期:2024-04-23
  • 录用日期:2024-04-24
  • 在线发布日期:
  • 出版日期:
第十一届航天复合材料成形与加工工艺技术中心交流会 征文通知

关闭