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不同晶体取向单晶锗的力学性能
刘宁1,杨晓京1,刘浩1,余证1
昆明理工大学机电工程学院,昆明 650500
摘要:
为了研究微纳米尺度下单晶锗的力学特性,采用纳米压痕仪对单晶锗(100)(110)和(111)晶面进行了纳米压痕实验,并通过原子力显微镜对材料表面进行了观测。根据单晶锗各晶面的位移-载荷曲线,对单晶锗各晶面的弹性回复率、硬度、弹性模量与压入深度之间的关系进行了分析。结果表明:单晶锗在加载过程中分别经历了弹性变形、塑性变形和脆性变形三个阶段。当压入深度超过500 nm时,加载曲线上有突进点产生;当压入深度超过100 nm时,卸载曲线上有突退点产生。单晶锗的残余压痕形貌表现为凸起状,表明单晶锗具有较低的加工硬化趋势。当压入深度达到100 nm时,单晶锗表现出明显的尺寸效应,且单晶锗(111)晶面具有最低硬度和弹性模量值。表明相对于其他两个晶面,单晶锗(111)晶面具有更好的塑性变形能力。
关键词:  单晶锗  纳米压痕  塑性变形  尺寸效应
DOI:10.12044/j.issn.1007-2330.2019.04.013
分类号:TG115.5+1
基金项目:国家自然科学基金项目 51765027 ; 昆明理工大学分析测试基金资助 2018M20172103016 国家自然科学基金项目(51765027);昆明理工大学分析测试基金资助(2018M20172103016)
Mechanical Properties of Single Crystal Germanium With Different Crystal Orientations
LIU Ning1,YANG Xiaojing1,LIU Hao1,YU Zheng1
Faculty of Mechanical and Electrical Engineering, Kunming University of Science and Technology, Kunming 650500
Abstract:
In order to study the mechanical properties of single crystal germanium at micro-nano scale, nanoindentation experiment was conducted on the Ge (100) (110) and (111) by using nanoindenter. Atomic force microscopy was applied to observe the surface of the material. Furthermore, the relationships between the elastic recovery rate, hardness, elastic modulus and indentation depth of germanium was analyzed according to the displacement-load curves of Ge(100) (110) and (111). Results show that elastic deformation, plastic deformation and brittle fracture occur in the loading process of single crystal germanium. When the indentation depth reaches 500 nm, there are pop-in points on the loading curve, while the pop-out points show up on the unloading curve when the indentation depth reaches 100 nm. Also, the pile-up behavior occurs in the residual indentation morphology of single crystal germanium, which demonstrate that single crystal germanium has a low tendency to work hardening. When the indentation depth reaches 100 nm, single crystal germanium shows an obvious size effect, and Ge(111)has the lowest hardness and elastic modulus, which shows that Ge (111) has the best plastic deformation ability relative to the other two crystal planes.
Key words:  Single crystal germanium  Nanoindentation  Plastic deformation  Size effect